Super Polished Fused Silica and Fused Quartz

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Super Polished Fused Silica and Fused Quartz

Wafers, substrates and optical windows now can be super-polished to have a 3 - 4 Angstrom Ra surface finish.

The surface finish of a polished fused silica wafer can be improved by repolishing to reach 3 - 4 Angstrom Ra superpolished smoothness. If the polished surfaces have been compromised during processing, these surfaces also can be improved by repolishing to 3 - 4 Angstrom level with minimal stock removal.

Standard polish on Fused Silica with 5.1 to 6.7 Angstrom Ra surface finish - prior to superpolishing.

pre-polish XY image

pre-polish 3D image


WYKO Scan of a Super-Polished Surface with 3.4 to 3.9 Angstrom Ra surface finish.

post-polish XY image

post-polish 3D image

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Updated: 19 October 2010